Yeah, this is a common issue. There was a lot of hype initially about basically just taking large-scale mechanical designs and shrinking them. The issue is that anything where you have moving parts in contact, they wear extremely quickly because things tend to stick together at that scale (combined with extremely fast speeds involved in scaling things down)
All the MEMS that are actually used in practice avoid this: they are effectively entirely flexural structures, nothing rubs against anything else, they just flex in place. This kind of structure can last almost indefinitely (especially since they're usually made of a single crystal, making the usual creep/cracking wear mechanisms mostly a non-issue)
All the MEMS that are actually used in practice avoid this: they are effectively entirely flexural structures, nothing rubs against anything else, they just flex in place. This kind of structure can last almost indefinitely (especially since they're usually made of a single crystal, making the usual creep/cracking wear mechanisms mostly a non-issue)